DocumentCode
775831
Title
Effect of multipolar magnetic field on the electron density in a plasma reactor
Author
Takekida, Hideto ; Nanbu, Kenichi
Author_Institution
Inst. of Fluid Sci., Tohoku Univ., Sendai, Japan
Volume
33
Issue
2
fYear
2005
fDate
4/1/2005 12:00:00 AM
Firstpage
344
Lastpage
345
Abstract
The effect of the multipolar magnetic field on the plasma density is visualized using the particle-in-cell/Monte Carlo method. The region of high-plasma density for various magnetic fields is localized near the wall of a reactor.
Keywords
Monte Carlo methods; discharges (electric); plasma confinement; plasma density; plasma simulation; Monte Carlo method; electron density; high-plasma density; multipolar magnetic field; particle-in-cell method; plasma reactor; visualization; Argon; Electron emission; Inductors; Magnetic confinement; Magnetic fields; Plasma confinement; Plasma density; Plasma materials processing; Plasma simulation; Plasma temperature; Multipolar magnetic field; particle modeling; particle-in-cell/Monte Carlo (PIC/MC) simulation; processing plasma;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2005.845004
Filename
1420468
Link To Document