• DocumentCode
    775874
  • Title

    Glow discharge around piezoelectric transformer operated under higher-order vibration modes

  • Author

    Itoh, Haruo ; Teranishi, Kenji ; Suzuki, Susumu

  • Author_Institution
    Graduate Sch. of Eng., Chiba Inst. of Technol., Japan
  • Volume
    33
  • Issue
    2
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    352
  • Lastpage
    353
  • Abstract
    We have been developing compact plasma reactors using a piezoelectric transformer (PT). The plasma reactors were operated by three fundamental vibration modes, (1/2)λ,λ, and (3/2)λ-modes according to the general usage of the PT. However, through our experiments, we found that glow discharge appears while driving the PT at higher frequencies than the fundamental vibration modes, which are abnormal for the operations of PT. In such higher-order operations, the glow discharge behaves in diverse and unique profiles. This paper presents some images of low-pressure glow discharge produced by the PT driven in higher-order vibration modes.
  • Keywords
    glow discharges; nitrogen; piezoelectric devices; transformers; N; compact plasma reactors; higher-order vibration modes; low-pressure glow discharge; piezoelectric transformer; Frequency diversity; Glow discharges; Induction generators; Inductors; Nitrogen; Piezoelectric effect; Plasmas; Resonance; Surface discharges; Vibrations; Glow discharge; higher-order vibration mode; low pressure; nitrogen; piezoelectric transformer;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2005.845076
  • Filename
    1420472