DocumentCode
775874
Title
Glow discharge around piezoelectric transformer operated under higher-order vibration modes
Author
Itoh, Haruo ; Teranishi, Kenji ; Suzuki, Susumu
Author_Institution
Graduate Sch. of Eng., Chiba Inst. of Technol., Japan
Volume
33
Issue
2
fYear
2005
fDate
4/1/2005 12:00:00 AM
Firstpage
352
Lastpage
353
Abstract
We have been developing compact plasma reactors using a piezoelectric transformer (PT). The plasma reactors were operated by three fundamental vibration modes, (1/2)λ,λ, and (3/2)λ-modes according to the general usage of the PT. However, through our experiments, we found that glow discharge appears while driving the PT at higher frequencies than the fundamental vibration modes, which are abnormal for the operations of PT. In such higher-order operations, the glow discharge behaves in diverse and unique profiles. This paper presents some images of low-pressure glow discharge produced by the PT driven in higher-order vibration modes.
Keywords
glow discharges; nitrogen; piezoelectric devices; transformers; N; compact plasma reactors; higher-order vibration modes; low-pressure glow discharge; piezoelectric transformer; Frequency diversity; Glow discharges; Induction generators; Inductors; Nitrogen; Piezoelectric effect; Plasmas; Resonance; Surface discharges; Vibrations; Glow discharge; higher-order vibration mode; low pressure; nitrogen; piezoelectric transformer;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2005.845076
Filename
1420472
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