DocumentCode :
776099
Title :
Two-dimensional profiles of electric fields in a radio frequency argon plasma above nonuniformities present on a surface
Author :
Barnat, E.V. ; Hebner, G.A.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Volume :
33
Issue :
2
fYear :
2005
fDate :
4/1/2005 12:00:00 AM
Firstpage :
392
Lastpage :
393
Abstract :
Laser-induced fluorescence-dip spectroscopy was used to measure two-dimensional (2-D) maps of the electric field present in an argon discharge above a ratio frequency-powered, nonuniform surface. Electric fields were obtained from experimentally measured Stark shifts of the energy of argon Rydberg states. The 2-D maps of the electric fields demonstrated that nonuniformities present on an electrode have long-range effects on the structure of the sheath.
Keywords :
Rydberg states; Stark effect; argon; high-frequency discharges; plasma diagnostics; plasma sheaths; Ar; Stark shifts; argon Rydberg states; argon discharge; electrode; laser-induced fluorescence-dip spectroscopy; nonuniform surface; radiofrequency argon plasma; radiofrequency-powered surface; sheath structure; two-dimensional electric field profiles; Argon; Electric variables measurement; Fluorescence; Frequency measurement; Nonuniform electric fields; Plasma measurements; Radio frequency; Spectroscopy; Surface discharges; Two dimensional displays;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2005.845346
Filename :
1420492
Link To Document :
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