Laser-particle interactions in an RF capacitively coupled dusty plasma

Author

Remy, J. ; Dingemans, G. ; Sorokin, M. ; Baede, A.H.F.M. ; Stoffels, W.W. ; Kroesen, G.M.W.

Author_Institution

Appl. Phys. Dept., Eindhoven Univ. of Technol., Netherlands

Volume

33

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

394

Lastpage

395

Abstract

Laser diagnostic studies of capacitively coupled radio frequency discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles´ formation and behavior. The formation mechanism of those macroscopic particulates needs to be clarified to enhance the product control in the surface processing industry. Laser light is scattered from in situ formed particles and is used to track their formation and transport under different plasma conditions. The results show that optical scattering can provide valuable information on the particles´ growth and behavior. It also proves to be a good process-monitoring tool.

Keywords

argon; dusty plasmas; high-frequency discharges; organic compounds; plasma diagnostics; plasma light propagation; plasma transport processes; Ar; RF capacitively coupled dusty plasma; argon; capacitively coupled radiofrequency discharges; dust particles; laser diagnostic studies; laser light scattering; laser-particle interactions; macroscopic particulates; optical scattering; particle transport; process-monitoring tool; silane; surface processing industry; Argon; Dusty plasma; Industrial control; Light scattering; Optical coupling; Optical scattering; Particle scattering; Particle tracking; Radio frequency; Surface discharges; Dusty plasma; laser scattering; particles; silane;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2005.844949

Filename

1420493