Imaging of the anode plasma plume development in a hot refractory anode vacuum arc

Author

Beilis, Isak I. ; Shashurin, A. ; Nemirovsky, A. ; Boxman, R.L. ; Goldsmith, S.

Author_Institution

Tel Aviv Univ., Israel

Volume

33

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

408

Lastpage

409

Abstract

The hot refractory anode vacuum arc (HRAVA) is a plasma source where the source of the plasma flux is re-evaporation from the surface of a refractory anode of material originally emitted from the cathode. This plasma is used to deposit metallic films with small macroparticle contamination. Photographs of different stages of the development of the HRAVA are presented, allowing tracing of the details the development and giving characteristic times of the HRAVA development.

Keywords

anodes; plasma deposition; plasma heating; plasma sources; vacuum arcs; anode heating; anode plasma plume imaging; cathode; hot refractory anode vacuum arc; macroparticle contamination; metallic film deposition; plasma source; reevaporation; Anodes; Cathodes; Contamination; Laboratories; Optical films; Plasma materials processing; Plasma properties; Plasma sources; Plasma temperature; Vacuum arcs; Anode heating; anode temperature; asymmetric anode; hot refractory anode; macroparticle free; plasma plume; plasma source; vacuum arc; vacuum arc deposition;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2005.845015

Filename

1420500