Title :
Imaging of the anode plasma plume development in a hot refractory anode vacuum arc
Author :
Beilis, Isak I. ; Shashurin, A. ; Nemirovsky, A. ; Boxman, R.L. ; Goldsmith, S.
Author_Institution :
Tel Aviv Univ., Israel
fDate :
4/1/2005 12:00:00 AM
Abstract :
The hot refractory anode vacuum arc (HRAVA) is a plasma source where the source of the plasma flux is re-evaporation from the surface of a refractory anode of material originally emitted from the cathode. This plasma is used to deposit metallic films with small macroparticle contamination. Photographs of different stages of the development of the HRAVA are presented, allowing tracing of the details the development and giving characteristic times of the HRAVA development.
Keywords :
anodes; plasma deposition; plasma heating; plasma sources; vacuum arcs; anode heating; anode plasma plume imaging; cathode; hot refractory anode vacuum arc; macroparticle contamination; metallic film deposition; plasma source; reevaporation; Anodes; Cathodes; Contamination; Laboratories; Optical films; Plasma materials processing; Plasma properties; Plasma sources; Plasma temperature; Vacuum arcs; Anode heating; anode temperature; asymmetric anode; hot refractory anode; macroparticle free; plasma plume; plasma source; vacuum arc; vacuum arc deposition;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845015
