Title :
Performance of silicon micromachined waveguide at W-band
Author :
Becker, J.P. ; East, J.R. ; Katehi, L.P.B.
Author_Institution :
Dept. of Electr. & Comput. Eng., Montana State Univ., Bozeman, MT, USA
fDate :
6/20/2002 12:00:00 AM
Abstract :
Fabrication and measurement of low-loss micromachined waveguides developed in (001) silicon through wet anisotropic etching is detailed. Such waveguides are candidates for use in submillimetre-wave systems owing to their compatibility with both efficient micromachined horn antenna elements and planar-based circuitry
Keywords :
elemental semiconductors; etching; horn antennas; micromachining; planar waveguides; silicon; submillimetre wave devices; Si; W-band; horn antenna elements; low-loss waveguides; micromachined waveguide; planar-based circuitry; submillimetre-wave systems; wet anisotropic etching;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20020457
