• DocumentCode
    777008
  • Title

    Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes

  • Author

    Kim, S.-O. ; Eden, J.G.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA
  • Volume
    33
  • Issue
    2
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    566
  • Lastpage
    567
  • Abstract
    Arrays of microdischarge devices, 100×100 μm2 in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5×5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.
  • Keywords
    discharges (electric); electrodes; microcavities; neon; plasma pressure; plasma production; plasma transport processes; 0.4 to 1.5 mA; 100 mum; 200 to 600 torr; Ne; Ne gas; interdigitated electrodes; photodefinable glass; square cross-section microdischarge device arrays; square microdischarge pixels; Assembly; Electrodes; Glass; Glow discharges; Lithography; Microcavities; Plasma applications; Plasma devices; Plasma measurements; Voltage; Interdigitated electrodes; microdischarges; microplasmas; photolithography;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2005.845309
  • Filename
    1420579
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=777008