Title :
Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes
Author :
Kim, S.-O. ; Eden, J.G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA
fDate :
4/1/2005 12:00:00 AM
Abstract :
Arrays of microdischarge devices, 100×100 μm2 in cross section, have been fabricated in a photodefinable glass, and electrically driven by interdigitated electrodes. Operated in Ne gas at pressures from 200 to 600 torr, 5×5 arrays of square microdischarge pixels are bright and draw a total current of 0.4-1.5 mA for direct current operating voltages of <200 V.
Keywords :
discharges (electric); electrodes; microcavities; neon; plasma pressure; plasma production; plasma transport processes; 0.4 to 1.5 mA; 100 mum; 200 to 600 torr; Ne; Ne gas; interdigitated electrodes; photodefinable glass; square cross-section microdischarge device arrays; square microdischarge pixels; Assembly; Electrodes; Glass; Glow discharges; Lithography; Microcavities; Plasma applications; Plasma devices; Plasma measurements; Voltage; Interdigitated electrodes; microdischarges; microplasmas; photolithography;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845309
