Title :
Microdischarge devices with a nanoporous Al2O3 dielectric: operation in Ne and air
Author :
Park, S.-J. ; Eden, J.G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA
fDate :
4/1/2005 12:00:00 AM
Abstract :
Nanoporous alumina, grown by wet chemical processing on aluminum foil, has been found to be a superior dielectric for microdischarge devices. Devices in which both the Al anode and cathode are encapsulated with this dielectric, and the microcavities are cylindrical with a diameter of 100-300 μm, operate stably in 700 torr of Ne and one atmosphere of air.
Keywords :
alumina; discharges (electric); plasma instability; plasma pressure; plasma production; 1 atm; 100 to 300 mum; 700 torr; Al anode; Al cathode; Al2O3; cylindrical microcavities; microdischarge devices; nanoporous Al2O3 dielectric; nanoporous alumina; wet chemical processing; Aluminum; Chemical processes; Dielectric devices; Electrodes; Microcavities; Nanoporous materials; Nonhomogeneous media; Optical arrays; Optical devices; Optical refraction; Alumina; dielectric; microcavity; microdischarges;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845268
