Experimental investigations on miniaturized high-frequency vacuum electron devices

Author

Han, Seong-Tae ; Jeon, Seok-Gy ; Shin, Young-Min ; Jang, Kyu-Ha ; So, Jin-Kyu ; Kim, Jong-Hyun ; Chang, Suk-sang ; Park, Gun-Sik

Author_Institution

Sch. of Phys., Seoul Nat. Univ., South Korea

Volume

33

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

679

Lastpage

684

Abstract

We investigated the foundations for high-frequency vacuum electron devices experimentally, with emphasis on deep etch X-ray lithography: lithographie, galvanoformung, abformung (LIGA) to fabricate a miniaturized interaction circuit and a photonic crystal (PC) resonator to excite a stable high-order mode. The successful operation of a LIGA-fabricated folded-waveguide traveling-wave tube was reported. From such physical considerations as Debye length and photonic band gap, we proposed a reflex klystron adopting a cold cathode and a PC resonator.

Keywords

LIGA; cathodes; cavity resonators; klystrons; photonic band gap; photonic crystals; travelling wave tubes; vacuum microelectronics; vacuum tubes; waveguides; Debye length; LIGA; cold cathode; deep etch X-ray lithography; folded-waveguide traveling-wave tube; high-frequency vacuum electron devices; lithographie galvanoformung abformung; miniaturized interaction circuit; photonic band gap; photonic crystal resonator; reflex klystron; Cathodes; Circuits; Current density; Electron beams; Electron devices; Elementary particle vacuum; Etching; Frequency; Quantum cascade lasers; X-ray lithography; Debye length; deep etch X-ray lithography: lithographie, galvanoformung, abformung (LIGA); photonic crystal (PC) resonator; terahertz;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2005.844529

Filename

1420607