DocumentCode

777454

Title

Inertial-grade in-plane resonant silicon accelerometer

Author

Seok, Sangok ; Chun, K.

Volume

42

Issue

19

fYear

2006

Firstpage

1092

Lastpage

1093

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20061774

Filename

1705798