Time-resolved diagnostics in a pulsed, electron beam-generated plasma

Author

Walton, Scott G. ; Leonhardt, Darrin ; Fernsler, Richard F.

Author_Institution

Plasma Phys. Div., U.S. Naval Res. Lab., Washington, DC, USA

Volume

33

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

838

Lastpage

843

Abstract

Time-resolved ion flux and energy distributions were measured at an electrode located adjacent to a pulsed, electron beam-generated plasma produced in argon. A Langmuir probe was also used to determine time-dependent electron temperature and plasma density. Temporal variations in the incident Ar⁺ and Ar⁺² ion energy and flux were correlated to changes in the electron temperature and plasma density. The evolution of the plasma density and ion flux is understood by considering the loss mechanisms of each ion species.

Keywords

Langmuir probes; argon; electrodes; mass spectroscopy; plasma density; plasma temperature; time resolved spectra; Ar; Langmuir probe; argon; electron temperature; energy distributions; ion species loss mechanism; plasma density; pulsed electron-beam generated plasma; time resolved diagnostics; time-resolved ion flux; Argon; Electrodes; Electron beams; Energy measurement; Plasma density; Plasma diagnostics; Plasma measurements; Plasma temperature; Probes; Pulse measurements; Ion energy measurement; mass spectrometry; plasma diagnostics; pulsed plasmas;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2005.845239

Filename

1420628