Title :
Effect of post oxidation anneal on VUV radiation-hardness of the Si/SiO2 system studied by positron annihilation spectroscopy
Author :
Clement, M. ; de Nijs, J.M.M. ; van Veen, A. ; Schut, H. ; Balk, P.
Author_Institution :
Delft Univ. of Technol., Netherlands
fDate :
12/1/1995 12:00:00 AM
Abstract :
The effect of a post oxidation anneal at 1000°C in a N2 ambient of the thermally grown Si/SiO2 system was investigated using vacuum ultraviolet irradiation for determining the generation of interface traps of the Al metallized system in combination with positron annihilation spectroscopy to characterize the structure of the oxide network. A correlation was found between the generation of interface traps and the S parameter of the positron trapping sites in the oxide close to the Si. It appears likely that the positrons are trapped in the larger near-interfacial oxide network interstices. These interstices could act as scavengers for the metastable intermediate (atomic hydrogen or excitons) involved in the generation of the interface traps
Keywords :
MIS devices; aluminium; annealing; electron traps; elemental semiconductors; positron annihilation; radiation effects; radiation hardening (electronics); silicon; silicon compounds; 1000 degC; Al-SiO2-Si; MOS system; N2; S parameter; VUV radiation-hardness; interface traps; metastable intermediate; near-interfacial network interstices; oxide network; positron annihilation spectroscopy; positron trapping sites; post oxidation anneal; vacuum ultraviolet irradiation; Annealing; Character generation; Hydrogen; Metallization; Metastasis; Oxidation; Positrons; Scattering parameters; Spectroscopy; Vacuum systems;
Journal_Title :
Nuclear Science, IEEE Transactions on
