DocumentCode
778072
Title
Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator
Author
Uranga, A. ; Verd, J. ; López, J.L. ; Teva, J. ; Abadal, G. ; Torres, F. ; Esteve, J. ; Pérez-Murano, F. ; Barniol, N.
Author_Institution
Dept. of Electron. Eng., Univ. Autonoma de Barcelona
Volume
43
Issue
8
fYear
2007
Firstpage
452
Lastpage
454
Abstract
The design and test of a fully integrated CMOS-MEMS-MIXLER, using a commercial technology (AMS 0.35 mum) is presented. The MEMS structure is basically a clamped-clamped beam resonator implemented with the polysilicon capacitance module of the selected technology, showing a fundamental lateral resonance frequency of 22.5 MHz. Two different approaches based, respectively, on the nonlinearity of the voltage against the excitation force and on the amplitude modulation of the excitation signal, have been proposed in order to operate the MEMS as a MIXLER
Keywords
CMOS integrated circuits; VHF filters; integrated circuit testing; micromechanical resonators; mixers (circuits); 22.5 MHz; VHF CMOS-MEMS clamped-clamped beam resonator; amplitude modulation; excitation force; excitation signal; fully integrated MIXLER; lateral resonance frequency; polysilicon capacitance module;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20070580
Filename
4155595
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