Title :
Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator
Author :
Uranga, A. ; Verd, J. ; López, J.L. ; Teva, J. ; Abadal, G. ; Torres, F. ; Esteve, J. ; Pérez-Murano, F. ; Barniol, N.
Author_Institution :
Dept. of Electron. Eng., Univ. Autonoma de Barcelona
Abstract :
The design and test of a fully integrated CMOS-MEMS-MIXLER, using a commercial technology (AMS 0.35 mum) is presented. The MEMS structure is basically a clamped-clamped beam resonator implemented with the polysilicon capacitance module of the selected technology, showing a fundamental lateral resonance frequency of 22.5 MHz. Two different approaches based, respectively, on the nonlinearity of the voltage against the excitation force and on the amplitude modulation of the excitation signal, have been proposed in order to operate the MEMS as a MIXLER
Keywords :
CMOS integrated circuits; VHF filters; integrated circuit testing; micromechanical resonators; mixers (circuits); 22.5 MHz; VHF CMOS-MEMS clamped-clamped beam resonator; amplitude modulation; excitation force; excitation signal; fully integrated MIXLER; lateral resonance frequency; polysilicon capacitance module;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20070580
