• DocumentCode
    780162
  • Title

    Instabilities in Capacitively Coupled Radio-Frequency Discharges

  • Author

    Schulze, Julian ; Luggenholscher, Dirk ; Czarnetzki, Uwe

  • Author_Institution
    Inst. for Exp. Phys., Ruhr-Univ. Bochum, Bochum
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    1402
  • Lastpage
    1403
  • Abstract
    Instabilities in an asymmetric capacitively coupled radio-frequency discharge are observed at pressures above 100 Pa if a circular quartz glass tube is inserted into the discharge parallel to the powered electrode. The instabilities are observed with a charge-coupled-device camera as localized plasma balls. The number of these so-called plasmoids increases with increasing pressure. At different pressures, different modes are observed.
  • Keywords
    high-frequency discharges; plasma diagnostics; plasma instability; asymmetric capacitively coupled radio-frequency discharge; charge-coupled-device camera; circular quartz glass tube; discharge instability; localized plasma balls; plasma modes; plasmoids; powered electrode; Capacitively coupled RF discharge; instabilities; plasmoids;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.923829
  • Filename
    4558029