Title :
Instabilities in Capacitively Coupled Radio-Frequency Discharges
Author :
Schulze, Julian ; Luggenholscher, Dirk ; Czarnetzki, Uwe
Author_Institution :
Inst. for Exp. Phys., Ruhr-Univ. Bochum, Bochum
Abstract :
Instabilities in an asymmetric capacitively coupled radio-frequency discharge are observed at pressures above 100 Pa if a circular quartz glass tube is inserted into the discharge parallel to the powered electrode. The instabilities are observed with a charge-coupled-device camera as localized plasma balls. The number of these so-called plasmoids increases with increasing pressure. At different pressures, different modes are observed.
Keywords :
high-frequency discharges; plasma diagnostics; plasma instability; asymmetric capacitively coupled radio-frequency discharge; charge-coupled-device camera; circular quartz glass tube; discharge instability; localized plasma balls; plasma modes; plasmoids; powered electrode; Capacitively coupled RF discharge; instabilities; plasmoids;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.923829