Title :
A Minimized SiO
Waveguide With an Antiresonant Reflecting Structure for Large-Scale Optical Integrations
Author :
Dai, Daoxin ; Hu, Rui ; He, Sailing
Author_Institution :
Centre for Opt. & Electromagn. Res., Zhejiang Univ., Hangzhou
fDate :
5/15/2007 12:00:00 AM
Abstract :
A minimized SiO2 waveguide with an antiresonant reflecting buffer, a SiO2 core, and an air cladding is presented. The buffer includes multiple periods of antiresonant reflecting structure to lower leakage loss to the substrate. Theoretically speaking, when there are three periods of etch-through antiresonant reflecting structures, one obtains a straight minimized SiO 2 waveguide with a low leakage loss (<0.01 dB/cm) and a bending radius as small as 15 mum (because of the large index contrast between the core (SiO2) and the air cladding in the lateral direction)
Keywords :
claddings; integrated optics; optical losses; optical waveguides; silicon compounds; SiO2; SiO2 waveguide; air cladding; antiresonant reflecting buffer; large-scale optical integrations; leakage loss; Electromagnetic waveguides; Etching; Lithography; Optical buffering; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Programmable control; Refractive index; Antiresonant reflecting; SiO$_{2}$; bending; deeply etched; leakage loss;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2007.895891