Title :
A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator
Author :
Lee, Joshua E -Y ; Bahreyni, Behraad ; Zhu, Yong ; Seshia, Ashwin A.
Author_Institution :
Dept. of Eng., Univ. of Cambridge, Cambridge
fDate :
7/1/2008 12:00:00 AM
Abstract :
A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb.
Keywords :
micromechanical resonators; oscillators; silicon; silicon-on-insulator; SOI; bulk acoustic mode; frequency 2.18 MHz; micromechanical resonator; microresonator oscillator; pressure 4 mtorr; short term Allan deviation; single crystal silicon; timing element; timing reference; Acoustic sensors; Feedback loop; Foundries; Microcavities; Micromechanical devices; Oscillators; Q factor; Resonant frequency; Silicon; Timing; Allan deviation; MEMS oscillator; bulk acoustic resonators; high quality factor; single-crystal silicon (SCS);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2008.2000643
