DocumentCode
781922
Title
Corrosion in plastic packages-sensitive initial delamination recognition
Author
Selig, Otmar ; Alpern, Peter ; Tilgner, Rainer
Author_Institution
Semicond. Div., Siemens AG, Munich, Germany
Volume
18
Issue
2
fYear
1995
fDate
5/1/1995 12:00:00 AM
Firstpage
353
Lastpage
357
Abstract
The interface between the molding compound (MC) and the chip surface is of considerable interest for failure analysis on plastic-packaged chips. Scanning acoustic microscopy (SAM) is widely used for nondestructive evaluation in this field. Prior research of stressed components has shown that some delaminations containing microbridges, or “spongy” elements, are undetectable by SAM. Corrosion proves to be a sensitive mechanism for detecting these failures. In certain cases corrosion can be detected quasinondestructively by IR microscopy, while conventional destructive physical analysis and optical microscopy remain the easiest way to assess it. Degradation of the interface molding compound and chip is detectable by SAM at a later stage
Keywords
acoustic microscopy; corrosion testing; delamination; failure analysis; integrated circuit packaging; nondestructive testing; optical microscopy; plastic packaging; IR microscopy; chip surface; corrosion; destructive physical analysis; failure analysis; initial delamination recognition; microbridges; molding compound; nondestructive evaluation; optical microscopy; plastic packages; scanning acoustic microscopy; Acoustic signal detection; Corrosion; Delamination; Failure analysis; Moisture; Optical microscopy; Optical sensors; Plastic packaging; Thermal stresses; Thermomechanical processes;
fLanguage
English
Journal_Title
Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
Publisher
ieee
ISSN
1070-9894
Type
jour
DOI
10.1109/96.386273
Filename
386273
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