DocumentCode :
782522
Title :
Electrostriction enhancement of solid-state capacitance sensing
Author :
Shkel, Yuri M. ; Ferrier, Nicola J.
Author_Institution :
Dept. of Mech. Eng., Univ. of Wisconsin, Madison, WI, USA
Volume :
8
Issue :
3
fYear :
2003
Firstpage :
318
Lastpage :
325
Abstract :
This paper analyzes the performance of a solid-state capacitance sensor that extends classical modeling to incorporate an electrostriction model of isotropic linear elastic dielectrics. A capacitance sensor which incorporates an elastic dielectric layer between the electrodes exhibits higher sensitivity and is more robust than its air-gap or vacuum-gap counterparts. Sensors with polyester and urethane polymer dielectric layers are tested for the response to normal loads and are compared with air-gap setups of same geometry. Experimental data suggest that the solid-state sensor has linear response in loads range up to six orders of magnitude and demonstrates a two to three times stronger output signal than air-gap designs. Potential for future development and application of solid capacitance sensors is discussed.
Keywords :
capacitive sensors; electrostriction; spatial variables measurement; air-gap setups; capacitance sensor; deformation measurement; displacement measurement; elastic dielectric layer; electrostriction enhancement; isotropic linear elastic dielectrics; linear response; polyester dielectric layers; sensitivity; solid capacitance sensors; solid-state capacitance sensing; urethane polymer dielectric layers; Air gaps; Capacitance; Capacitive sensors; Dielectrics; Electrodes; Electrostriction; Performance analysis; Robustness; Solid modeling; Solid state circuits;
fLanguage :
English
Journal_Title :
Mechatronics, IEEE/ASME Transactions on
Publisher :
ieee
ISSN :
1083-4435
Type :
jour
DOI :
10.1109/TMECH.2003.816805
Filename :
1232291
Link To Document :
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