• DocumentCode
    782720
  • Title

    Vertically tapered spot size transformers fabricated by a simple masking technique

  • Author

    Jacobs, B. ; Zengerle, R. ; Faltin, K. ; Weiershausen, W.

  • Author_Institution
    Forschungszentrum der Deutschen Telekom AG, Darmstadt, Germany
  • Volume
    31
  • Issue
    10
  • fYear
    1995
  • fDate
    5/11/1995 12:00:00 AM
  • Firstpage
    794
  • Lastpage
    796
  • Abstract
    A novel, simple fabrication method of vertically tapered spot size transformers is demonstrated by screening the sample partially with a shadow mask during reactive ion etching. The authors measured a transmission loss of 2.3 dB for a simple taper structure from the chip waveguide without an antireflection coating on the fibre
  • Keywords
    masks; optical fibre couplers; optical fibre fabrication; optical fibre losses; sputter etching; 2.3 dB; chip waveguide; reactive ion etching; screening; shadow mask; taper structure; transmission loss; vertically tapered spot size transformers;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19950527
  • Filename
    386940