DocumentCode
782720
Title
Vertically tapered spot size transformers fabricated by a simple masking technique
Author
Jacobs, B. ; Zengerle, R. ; Faltin, K. ; Weiershausen, W.
Author_Institution
Forschungszentrum der Deutschen Telekom AG, Darmstadt, Germany
Volume
31
Issue
10
fYear
1995
fDate
5/11/1995 12:00:00 AM
Firstpage
794
Lastpage
796
Abstract
A novel, simple fabrication method of vertically tapered spot size transformers is demonstrated by screening the sample partially with a shadow mask during reactive ion etching. The authors measured a transmission loss of 2.3 dB for a simple taper structure from the chip waveguide without an antireflection coating on the fibre
Keywords
masks; optical fibre couplers; optical fibre fabrication; optical fibre losses; sputter etching; 2.3 dB; chip waveguide; reactive ion etching; screening; shadow mask; taper structure; transmission loss; vertically tapered spot size transformers;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19950527
Filename
386940
Link To Document