Title :
Poly(dimethylsiloxane)-Based Packaging Technique for Microchip Fluorescence Detection System Applications
Author :
Kim, Young-Hwan ; Shin, Kyeong-Sik ; Kang, Ji-Yoon ; Yang, Eun-Gyeong ; Paek, Kyeong-Kap ; Seo, Dae-Shik ; Ju, Byeong-Kwon
Author_Institution :
Microsystem Res. Center, Korea Inst. of Sci. & Technol., Seoul
Abstract :
A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD; S/N=3) of the system were 0.198 nA/muM and 10 muM, respectively
Keywords :
electronics packaging; fluorescence; micro-optics; microsensors; p-i-n photodiodes; fluorescence detection microchip; integration process; interference filter; optical filter; organic light-emitting diode; p-i-n photodiode; packaging technique; poly(dimethylsiloxane); portable fluorescence detection; thin-film structure; Detectors; Fluorescence; Interference; Light sources; Microchannel; Optical filters; Organic light emitting diodes; PIN photodiodes; Packaging; Transistors; Finger-type p–i–n photodiode; interference filter; microchannel; on-chip; organic light-emitting diode (OLED); poly(dimethylsiloxane) (PDMS)-based packaging;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2006.880355
