Title :
Buried annealed/proton-exchanged LiNbO3 waveguides fabricated by direct bonding technique
Author :
Fujimura, M. ; Beniya, K. ; Suhara, T.
Author_Institution :
Dept. Electr., Electron., & Inf. Eng., Osaka Univ., Suita
Abstract :
A new method for fabrication of buried annealed/proton-exchanged LiNbO3 waveguides using direct bonding technique is demonstrated. The buried waveguides were fabricated and tested at 1.55 m wavelength, and guided modes with excellent symmetry were obtained. The waveguides are suitable for efficient coupling to optical fibres and/or efficient nonlinear-optic wavelength conversion devices.
Keywords :
annealing; bonding processes; integrated optics; lithium compounds; optical fabrication; optical waveguides; LiNbO3; annealing; buried waveguides; direct bonding; efficient coupling; nonlinear-optic wavelength conversion devices; optical fibres; proton exchange; wavelength 1.55 mum;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20081471
