• DocumentCode
    783030
  • Title

    Buried annealed/proton-exchanged LiNbO3 waveguides fabricated by direct bonding technique

  • Author

    Fujimura, M. ; Beniya, K. ; Suhara, T.

  • Author_Institution
    Dept. Electr., Electron., & Inf. Eng., Osaka Univ., Suita
  • Volume
    44
  • Issue
    14
  • fYear
    2008
  • Firstpage
    856
  • Lastpage
    857
  • Abstract
    A new method for fabrication of buried annealed/proton-exchanged LiNbO3 waveguides using direct bonding technique is demonstrated. The buried waveguides were fabricated and tested at 1.55 m wavelength, and guided modes with excellent symmetry were obtained. The waveguides are suitable for efficient coupling to optical fibres and/or efficient nonlinear-optic wavelength conversion devices.
  • Keywords
    annealing; bonding processes; integrated optics; lithium compounds; optical fabrication; optical waveguides; LiNbO3; annealing; buried waveguides; direct bonding; efficient coupling; nonlinear-optic wavelength conversion devices; optical fibres; proton exchange; wavelength 1.55 mum;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20081471
  • Filename
    4558449
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=783030