• DocumentCode
    783243
  • Title

    Model-Based Processing of Microcantilever Sensor Arrays

  • Author

    Tringe, Joseph W. ; Clague, David S. ; Candy, James V. ; Sinensky, Asher K. ; Lee, Christopher ; Rudd, Robert E. ; Burnham, Alan K.

  • Author_Institution
    Lawrence Livermore Nat. Lab.
  • Volume
    15
  • Issue
    5
  • fYear
    2006
  • Firstpage
    1379
  • Lastpage
    1391
  • Abstract
    In this paper, we have developed a model-based processor (MBP) for a microcantilever-array sensor to detect target species in solution. We perform a proof-of-concept experiment, fit model parameters to the measured data and use them to develop a Gauss-Markov simulation. We then investigate two cases of interest, averaged deflection data and multichannel data. For this evaluation we extract model parameters via a model-based estimation, perform a Gauss-Markov simulation, design the optimal MBP and apply it to measured experimental data. The performance of the MBP in the multichannel case is evaluated by comparison to a "smoother" (averager) typically used for microcantilever signal analysis. It is shown that the MBP not only provides a significant gain (~80 dB) in signal-to-noise ratio (SNR), but also consistently outperforms the smoother by 40-60 dB. Finally, we apply the processor to the smoothed experimental data and demonstrate its capability for chemical detection. The MBP performs quite well, apart from a correctable systematic bias error
  • Keywords
    Markov processes; array signal processing; cantilevers; microsensors; Gauss-Markov simulation; chemical detection; microcantilever sensor arrays; model-based processor; signal analysis; Chemical sensors; Data mining; Gaussian processes; Performance evaluation; Predictive models; Sensor arrays; Sensor systems; Signal processing; Signal to noise ratio; Stress; Microcantilever; model-based processor (MBP); sensor; signal processing;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2006.880225
  • Filename
    1707798