Title :
Self-Aligned Microlens-Integrated Vertical-Cavity Surface-Emitting Lasers
Author :
Chang, Ki Soo ; Song, Young Min ; Lee, Yong Tak
Author_Institution :
Dept. of Inf. & Commun., Gwangju Inst. of Sci. & Technol.
Abstract :
A novel method for fabricating microlens-integrated vertical-cavity surface-emitting lasers (VCSELs) by selective oxidation of composition-graded digital alloy AlGaAs was developed. Due to the simultaneous formation of a microlens and oxide aperture via single-step oxidation, self-aligned microlens-integrated VCSELs could be fabricated using standard intracavity-contacted VCSEL processing without additional process steps. The output beam from the oxide-buried and oxide-removed AlGaAs microlens-integrated VCSELs was strongly focused to a beam radius of 3.7 and 3.5 mum at a distance of about 25 and 15mum, respectively, from the surface of the VCSEL
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; laser beams; laser cavity resonators; microlenses; optical focusing; oxidation; semiconductor lasers; surface emitting lasers; 15 mum; 25 mum; 3.5 mum; 3.7 mum; AlGaAs; beam focusing; composition-graded digital alloy; intracavity-contacted VCSEL processing; microlens; output laser beam; oxide aperture; oxide-buried VCSEL; oxide-removed VCSEL; selective oxidation; self-aligned microlens-integrated lasers; single-step oxidation; vertical-cavity surface-emitting lasers; Apertures; Laser beams; Lenses; Microoptics; Optical interconnections; Optical resonators; Optical scattering; Oxidation; Surface emitting lasers; Vertical cavity surface emitting lasers; Digital alloy; microlens; selective oxidation; vertical-cavity surface-emitting laser (VCSEL);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.884274
