Title :
An X- to ku-band 3-bit digital MEMS varactor
Author :
Dussopt, Laurent ; Rebeiz, Gabriel M.
Author_Institution :
Radiat. Lab., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
A 3-bit digital microelectromechanical system (MEMS) varactor bank is demonstrated on a low-cost glass substrate. It is composed of three discrete-position varactors, each of them achieving a capacitance ratio close to 3:1. The total capacitance of the varactor bank is tunable from 146 fF to 430 fF in eight states and is suitable for X- or Ku-band operation. The design can be easily scaled to Ka-band frequencies.
Keywords :
capacitance; coplanar waveguides; membranes; micromachining; microswitches; microwave switches; tuning; varactors; 146 to 430 fF; 3-bit digital MEMS varactor; CPW line; Ku-band operation; MEMS switch; X-band operation; capacitance ratio; digital microelectromechanical system varactor bank; discrete-position varactors; low-cost glass substrate; metal-air-metal capacitor; nonplanar membrane; total capacitance tunability; Biomembranes; Bridge circuits; Capacitance; Conductors; Coplanar waveguides; Electrodes; Glass; Microelectromechanical systems; Micromechanical devices; Varactors;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2003.817118
