MEMS-actuated microdisk resonators with variable power coupling ratios

Author

Lee, Ming-Chang M. ; Wu, Ming C.

Author_Institution

Electr. Eng. Dept., Univ. of California, Los Angeles, CA, USA

Volume

17

Issue

5

fYear

2005

fDate

5/1/2005 12:00:00 AM

Firstpage

1034

Lastpage

1036

Abstract

A novel tunable microdisk resonator with microelectromechanical-system (MEMS)-actuated deformable waveguides is demonstrated for the first time. The deformable waveguide enables us to continuously vary the power coupling ratio of the microdisks. A laterally coupled device with a quality factor of 7700 is fabricated on silicon-on-insulator substrate. An optical notch filter with variable attenuation at the resonant wavelength is successfully demonstrated, with an extinction ratio of 9 dB. The MEMS-actuated tunable microdisk is a basic building block for many dynamic wavelength-division-multiplexing circuits.

Keywords

Q-factor; integrated optics; integrated optoelectronics; micro-optics; microactuators; micromechanical resonators; notch filters; optical couplers; optical design techniques; optical fabrication; optical filters; optical resonators; optical testing; optical tuning; optical waveguides; wavelength division multiplexing; 9 dB; MEMS-actuated microdisk resonators; extinction ratio; microelectromechanical-system-actuated deformable waveguides; optical notch filter; power coupling ratio; quality factor; silicon-on-insulator substrate; tunable microdisk resonator; variable power coupling ratios; wavelength-division-multiplexing circuits; Coupling circuits; Optical attenuators; Optical filters; Optical resonators; Optical waveguides; Q factor; Resonance; Resonator filters; Silicon on insulator technology; Tunable circuits and devices; Microdisks; microelectromechanical devices; microresonators; optical resonators;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2005.845772

Filename

1424091