DocumentCode
786141
Title
A water-powered osmotic microactuator
Author
Su, Yu-Chuan ; Lin, Liwei ; Pisano, Albert P.
Author_Institution
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
Volume
11
Issue
6
fYear
2002
fDate
12/1/2002 12:00:00 AM
Firstpage
736
Lastpage
742
Abstract
This paper presents a microactuator that utilizes osmosis to produce mechanical actuation without consuming any electrical energy. The microactuator is made of cellulose acetate with cylindrical chamber of 500 to 2000 μm in diameter and of 200 to 1000 μm in depth. Sodium chloride is chosen as the osmotic driving agent to be placed inside the chamber. A semipermeable diaphragm made of cellulose acetate is processed at the bottom of the chamber to control the water flow. Either a cellulose acetate diaphragm or an impermeable diaphragm made of vinylidene chloride and acrylonitrile copolymer is spin-coated on top of the chamber as the actuation diaphragm. Using the principle of osmosis, this water-powered, osmotic microactuator can employ high osmotic pressure (a chemical potential) up to 35.6 MPa to provide hydrostatic pressure for mechanical actuation. Experimental measurements show that up to 800 μm vertical diaphragm movement (diaphragm size of 800 μm in diameter) and constant volume expansion rate of 4.5 to 11.5 nL/h can be achieved. When integrated with other microfluidic devices, this osmotic microactuator could serve as a clean, compact and inexpensive fluidic actuation source.
Keywords
diaphragms; membranes; microactuators; microfluidics; osmosis; 200 to 1000 micron; 250 to 1000 micron; 35.6 MPa; NaCl; NaCl osmotic driving agent; acrylonitrile copolymer; actuation diaphragm; cellulose acetate diaphragm; cylindrical chamber; fabrication process; fluidic actuation source; hydrostatic pressure; impermeable diaphragm; mechanical actuation; microfluidic devices; semipermeable diaphragm; theoretical models; vertical diaphragm movement; vinylidene chloride; water flow control; water-powered osmotic microactuator; Actuators; Biomembranes; Chemicals; Drug delivery; Microactuators; Microfluidics; Micromechanical devices; Osmosis; Size measurement; Volume measurement;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2002.805045
Filename
1097794
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