Title :
Improvement of near-ultraviolet InGaN-GaN light-emitting diodes with an AlGaN electron-blocking layer grown at low temperature
Author :
Tu, Ru-Chin ; Tun, Chun-Ju ; Pan, Shyi-Ming ; Chuo, Chang-Cheng ; Sheu, J.K. ; Tsai, Ching-En ; Wang, Te-Chung ; Chi, Gou-Chung
Author_Institution :
Opto-Electron. & Syst. Labs., Ind. Technol. Res. Inst., Hsinchu, Taiwan
Abstract :
The 400-nm near-ultraviolet InGaN-GaN multiple quantum well light-emitting diodes (LEDs) with Mg-doped AlGaN electron-blocking (EB) layers of various configurations and grown under various conditions, were grown on sapphire substrates by metal-organic vapor phase epitaxy system. LEDs with AlGaN EB layers grown at low temperature (LT) were found more effectively to prevent electron overflow than conventional LEDs with an AlGaN one grown at high temperature (HT). The electroluminescent intensity of LEDs with an LT-grown AlGaN layer was nearly three times greater than that of LEDs with an HT-grown AlGaN. Additionally, the LEDs with an LT-grown AlGaN layer in H/sub 2/ ambient were found to increase the leakage current by three orders of magnitude and reduce the efficiency of emission.
Keywords :
III-V semiconductors; MOCVD; electroluminescence; gallium compounds; indium compounds; leakage currents; light emitting diodes; semiconductor quantum wells; vapour phase epitaxial growth; 400 nm; AlGaN; AlGaN electron-blocking layer; InGaN-GaN; LEDs; Mg-doped AlGaN electron-blocking layers; electroluminescent intensity; electron overflow; high temperature; leakage current; low temperature; low temperature growth; metal-organic vapor phase epitaxy system; near-ultraviolet InGaN-GaN light-emitting diodes; sapphire substrates; Aluminum gallium nitride; Electrons; Epitaxial growth; Gallium nitride; Leakage current; Light emitting diodes; Protection; Quantum well devices; Substrates; Temperature;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2003.818240