DocumentCode :
786671
Title :
Nonlithographic fabrication of lateral superlattices for nanometric electromagnetic-optic applications
Author :
Liang, Jianyu ; Chik, Hope ; Xu, Jimmy
Author_Institution :
Div. of Eng., Brown Univ., Providence, RI, USA
Volume :
8
Issue :
5
fYear :
2002
Firstpage :
998
Lastpage :
1008
Abstract :
A nonlithographic technique that utilizes highly ordered anodized aluminum oxide (AAO) porous membrane as a template is employed as a general fabrication means for the formation of an array of vastly different two-dimensional lateral superlattice nanostructures. The fact that material systems as different as metals, semiconductors, and carbon nanotubes can be treated with the same ease attest to the generality of this nanofabrication approach. The original AAO membranes determine the uniformity, packing density, and size of the nanostructures. The flexibility of using a variety of materials, the accurate control over fabrication process, and the command over AAO template attributes, gives us the freedom of engineering various physical properties determined by the shape, size, composition, and doping of the nanostructures. The novel nanomaterial platform realized by this unique technique is powerfully enabling for a broad range of applications.
Keywords :
anodisation; arrays; carbon nanotubes; membranes; nanotechnology; reviews; superlattices; Al2O3; accurate control; array; carbon nanotubes; composition; doping; flexibility; general fabrication means; highly ordered anodized aluminum oxide porous membrane; lateral superlattices; metals; nanofabrication approach; nanomaterial platform; nanometric electromagnetic-optic applications; nanostructures; nonlithographic fabrication; packing density; physical properties; semiconductors; shape; size; template; two-dimensional lateral superlattice nanostructures; uniformity; Aluminum oxide; Biomembranes; Fabrication; Inorganic materials; Nanostructured materials; Organic materials; Semiconductor materials; Semiconductor nanostructures; Semiconductor superlattices; Shape control;
fLanguage :
English
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
1077-260X
Type :
jour
DOI :
10.1109/JSTQE.2002.804238
Filename :
1097851
Link To Document :
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