Immersion lens microscopy of photonic nanostructures and quantum dots

Author

Goldberg, Bennett B. ; Ippolito, S.B. ; Novotny, Lukas ; Liu, Zhiheng ; Ünlü, M. Selim

Author_Institution

Dept. of Phys., Boston Univ., MA, USA

Volume

8

Issue

5

fYear

2002

Firstpage

1051

Lastpage

1059

Abstract

We describe recent experimental and theoretical advances in immersion lens microscopy for, both surface and subsurface imaging as applied to photonic nanostructures. We examine in detail the ability of sharp metal tips to enhance local optical fields for nanometer resolution microscopy and spectroscopy. Finally, we describe a new approach to nano-optics, that of combining solid immersion microscopy with tip-enhanced focusing and show how such an approach may lead to 20-nm resolution with unity throughput.

Keywords

nanostructured materials; nanotechnology; optical focusing; optical microscopy; quantum dots; surface structure; 20-nm resolution; immersion lens microscopy; local optical fields; nano-optics; nanometer resolution microscopy; nanometer resolution spectroscopy; photonic nanostructures; quantum dots; sharp metal tips; silicon IC inspection; solid immersion microscopy; subsurface imaging; surface imaging; tip-enhanced focusing; unity throughput; Atom optics; Lenses; Nanostructures; Optical imaging; Optical microscopy; Optical refraction; Optical scattering; Optical variables control; Quantum dots; US Department of Transportation;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2002.804232

Filename

1097857