CMOS Microelectrode Array for Electrochemical Lab-on-a-Chip Applications

Microelectrode arrays (MEAs) offer numerous benefits over macroelectrodes due to their smaller sample size requirement, small form factor, low-power consumption, and higher sensitivity due to increased rates of mass transport. These features make MEAs well suited for microfluidic lab-on-a-chip applications. This paper presents two implementations of MEAs with and without an on chip potentiostat. We first describe an 8times8 array of 6 mum circular microelectrodes with center to center 37 mum spacing fabricated on silicon using conventional microfabrication techniques. Pads are provided for external connections to a potentiostat for electrochemical analysis. The second implementation is an individually addressable 32times32 array of 7 mum square microelectrodes with 37 mum center to center spacing on a CMOS chip with built-in very-large-scale integration potentiostat for electrochemical analysis. The integrated CMOS MEA is post processed at the die level to coat the exposed Al layers with Au. To verify microelectrode array behavior with individual addressability, cyclic voltammetry was performed using a potassium ferricyanide (K₃Fe(CN)₆) solution.