DocumentCode
787681
Title
Asymmetric focused-ion-beam trimming of longitudinal and perpendicular write heads
Author
Clinton, T.W. ; Zhang, Z.Z. ; Feng, Y.C. ; van der Heijden, P.A.A.
Author_Institution
Seagate Res., Seagate Technol., Pittsburgh, PA, USA
Volume
39
Issue
5
fYear
2003
Firstpage
2408
Lastpage
2410
Abstract
A novel focused-ion-beam (FIB) head trimming technique is described. As compared to the conventional approach of a symmetric trim, an asymmetric process, whereby only one side of a write pole is FIB milled to achieve the target width, is demonstrated to be robust and advantageous. We use this technique for both longitudinal and perpendicular HGA-level head trimming, demonstrating excellent recording performance out to areal densities of more than 100 Gb/in2.
Keywords
focused ion beam technology; ion-surface impact; magnetic heads; magnetic recording; perpendicular magnetic recording; FIB milled; areal densities; asymmetric focused-ion-beam trimming; longitudinal write heads; perpendicular write heads; target width; write pole; Degradation; Electrical resistance measurement; Instruments; Ion beams; Magnetic heads; Magnetic recording; Milling machines; Perpendicular magnetic recording; Robustness; System analysis and design;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2003.815465
Filename
1233092
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