• DocumentCode
    787681
  • Title

    Asymmetric focused-ion-beam trimming of longitudinal and perpendicular write heads

  • Author

    Clinton, T.W. ; Zhang, Z.Z. ; Feng, Y.C. ; van der Heijden, P.A.A.

  • Author_Institution
    Seagate Res., Seagate Technol., Pittsburgh, PA, USA
  • Volume
    39
  • Issue
    5
  • fYear
    2003
  • Firstpage
    2408
  • Lastpage
    2410
  • Abstract
    A novel focused-ion-beam (FIB) head trimming technique is described. As compared to the conventional approach of a symmetric trim, an asymmetric process, whereby only one side of a write pole is FIB milled to achieve the target width, is demonstrated to be robust and advantageous. We use this technique for both longitudinal and perpendicular HGA-level head trimming, demonstrating excellent recording performance out to areal densities of more than 100 Gb/in2.
  • Keywords
    focused ion beam technology; ion-surface impact; magnetic heads; magnetic recording; perpendicular magnetic recording; FIB milled; areal densities; asymmetric focused-ion-beam trimming; longitudinal write heads; perpendicular write heads; target width; write pole; Degradation; Electrical resistance measurement; Instruments; Ion beams; Magnetic heads; Magnetic recording; Milling machines; Perpendicular magnetic recording; Robustness; System analysis and design;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.2003.815465
  • Filename
    1233092