Title :
The effect of annealing on the microstructure and magnetic properties of Fe-Ta-Cr-N thin films
Author :
Wong, Bunsen Y. ; Suwabe, S. ; Tsuneda, F. ; Laughlin, David E.
Author_Institution :
Dept. of MSE, Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
11/1/1995 12:00:00 AM
Abstract :
The effect of Tanneal on Fe-Ta-Cr-N thin films has been studied. Crystallization of Fe was found to precede TaN. Results showed that Tanneal controls not only the grain size but also the amount of Ta and N which is in solution within the Fe matrix and the magnetic properties was determined largely by these two factors. In addition, TaN was found to nucleate both homogeneously and heterogeneously, according to the K-S OR, with respect to the Fe grain
Keywords :
annealing; chromium alloys; crystal microstructure; crystallisation; ferromagnetic materials; grain size; iron alloys; soft magnetic materials; sputtered coatings; tantalum alloys; Fe matrix; Fe-Ta-Cr-N; Fe-Ta-Cr-N thin films; annealing; crystallization; grain size; magnetic properties; microstructure; nucleation; Amorphous materials; Annealing; Crystallization; Intermetallic; Iron; Magnetic films; Magnetic properties; Microstructure; Optical films; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
