Title :
Modeling of periodic distributed MEMS-application to the design of variable true-time delay lines
Author :
Perruisseau-Carrier, Julien ; Fritschi, R. ; Crespo-Valero, P. ; Skrivervik, A.K.
Author_Institution :
Ecole Polytechnique Fed. de Lausanne, Lab. of Electromagn. & Acoust., Lausanne
Abstract :
This paper presents the modeling and design methods of true-time distributed microelectromechanical systems transmission lines (DMTLs) making use of periodic structure theory. New contributions to the analysis and reduction of the microelectromechanical systems (MEMS) shunt capacitors parasitics are also introduced. A prototype of a digital DMTL has been fabricated and measured, showing very good agreement with the comprehensive circuit model used for the design. It is believed that the periodic structure approach presented could be useful for other microwave periodic MEMS devices
Keywords :
capacitors; delay lines; micromechanical devices; microwave devices; periodic structures; transmission lines; distributed microelectromechanical systems transmission lines; microwave periodic MEMS devices; periodic distributed MEMS-application; periodic structure theory; shunt capacitor parasitics; variable true-time delay lines; Capacitors; Delay lines; Design methodology; Distributed parameter circuits; Microelectromechanical systems; Micromechanical devices; Periodic structures; Prototypes; Transmission line measurements; Transmission line theory; Distributed microelectromechanical systems transmission line (DMTL); microelectromechanical systems (MEMS); periodic structure; true-time delay lines (TTDLs);
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2005.860297
