DocumentCode :
7895
Title :
Clean Hands [MicroBusiness]
Author :
Schindler, Fred
Volume :
16
Issue :
7
fYear :
2015
fDate :
Aug. 2015
Firstpage :
20
Lastpage :
102
Abstract :
Discusses the importance of cleanliness and spotless conditions that are required in the production and manufacturing of semiconductor devices and materials.
Keywords :
Design engineering; Manufacturing processes; Semiconductor device manufacture;
fLanguage :
English
Journal_Title :
Microwave Magazine, IEEE
Publisher :
ieee
ISSN :
1527-3342
Type :
jour
DOI :
10.1109/MMM.2015.2429517
Filename :
7153042
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=7895
