Co-Cr Perpendicular Anisotropy Film Deposited by Evaporation with Ion Bombardment

The effect of ion bombardment during film growth was investigated for perpendicular anisotropy CoCr films. Films were prepared by a web-coater type evaporating system equipped with a Kaufman 3-cm ion source. The M_s, H_{c ⊥} and δθ₅₀ decreased, while H_{k/spl pert/} and the grain size increased, in bombarded films. These results indicate a reduction in crystallographic defects and Cr segregation, suggesting that grain boundaries play an important role in the segregation.