Title :
A 100 kV/200 A Blumlein Pulser for High-Energy Plasma Implantation
Author :
Rossi, José O. ; Ueda, Mário
Author_Institution :
Nat. Inst. for Space Res., Sao Jose Dos Campos
Abstract :
A high-voltage pulsed power supply of 100 kV/200 A with output short pulses of the order of 1 mus (based on stacked coaxial Blumlein technology) was developed for use in surface treatment of materials by plasma implantation. The plasma implantation process requires pulse repetition and the authors´ device is capable of operating at a frequency range of 10-150 Hz, depending on the level of the output voltage. Herein, the authors show that nitrogen-ion species were implanted into stainless steel surfaces (SS304) at high energies (> 30 keV) by using this pulser, inducing alpha phase as demonstrated by X-ray diffraction diagnostic. Moreover, microhardness tests of these treated samples have shown an improvement of about 13.0% for the surface hardness factor
Keywords :
X-ray diffraction; microhardness; plasma immersion ion implantation; pulsed power supplies; stainless steel; surface structure; surface treatment; 10 to 150 Hz; 100 kV; 200 A; Blumlein pulser; X-ray diffraction; high-energy plasma implantation; high-voltage pulsed power supply; microhardness tests; nitrogen-ion species; stainless steel surfaces; surface hardness; surface treatment; Coaxial components; Frequency; Plasma devices; Plasma materials processing; Pulsed power supplies; Steel; Surface treatment; Testing; Voltage; X-ray diffraction; Blumlein pulser; hardness factor; nitrogen; plasma implantation; stainless steel (SS); surface treatment;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2006.881305
