DocumentCode :
789951
Title :
Full/partial depletion effects in FinFETs
Author :
Xiong, W. ; Cleavelin, C. Rinn ; Wise, R. ; Yu, S. ; Pas, M. ; Zaman, R.J. ; Gostkowski, M. ; Matthews, K. ; Maleville, C. ; Patruno, P. ; King, T.-J. ; Colinge, J.P.
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
Volume :
41
Issue :
8
fYear :
2005
fDate :
4/14/2005 12:00:00 AM
Firstpage :
504
Lastpage :
506
Abstract :
Effects that are found exclusively in partially depleted or fully depleted SOI MOSFETs are shown to appear simultaneously in n-channel FinFETs. The gate-induced floating body effect is normally observed in partially depleted devices only, while ideal subthreshold slope is an exclusive trademark of fully depleted devices. Both effects can be observed concurrently in fully depleted FinFETs if the application of a back bias creates an accumulation layer at the bottom of the device.
Keywords :
MOSFET; field effect transistors; silicon-on-insulator; FinFET; SOI MOSFET; back bias; full depletion effects; gate-induced floating body effect; ideal subthreshold slope; partial depletion effects;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:20050281
Filename :
1425373
Link To Document :
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