Title :
Fabrication of a thick film sensor employing an ultrasonic oscillator
Author :
White, N.M. ; Leach, G.R.
Author_Institution :
Dept. of Electron. & Comput. Sci., Southampton Univ., UK
fDate :
5/1/1995 12:00:00 AM
Abstract :
The paper describes the design and fabrication of a sensor using a thick film acoustic wave oscillator. The development of a screen printable piezoelectric paste is discussed and an account is given of the fundamental operation of acoustic wave resonant sensors, devices which have traditionally found application in higher-cost, precision applications. The electronic circuitry is also described and experimental results are presented to illustrate how a thick film delay-line oscillator can be used as a force sensor
Keywords :
force measurement; piezoelectric transducers; surface acoustic wave delay lines; surface acoustic wave oscillators; surface acoustic wave sensors; thick film devices; ultrasonic devices; acoustic wave oscillator; acoustic wave resonant sensors; fabrication; force sensor; screen printable piezoelectric paste; thick film delay-line oscillator; thick film sensor; ultrasonic oscillator;
Journal_Title :
Science, Measurement and Technology, IEE Proceedings -
DOI :
10.1049/ip-smt:19951695