Title :
Cr Underlayer´s Effect on the Magnetic and Crystalline Properties of Co Alloy Film
Author :
Hikosaka, T. ; Tanaka, Y. ; Sonoda, T. ; Nishikawa, R.
Author_Institution :
Toshiba Corp.
fDate :
6/1/1988 12:00:00 AM
Keywords :
Atomic layer deposition; Chromium alloys; Cobalt alloys; Coercive force; Crystallization; Helium; Magnetic films; Magnetic properties; Sputtering; Substrates;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1988.4563725
