Title :
Ultrathin amorphous carbon overcoats by filtered cathodic arc deposition
Author :
Yamamoto, Takayuki ; Hyodo, Hiroyuki ; Tsuchitani, Shigeki ; Kaneko, Reizo
Author_Institution :
Fujitsu Ltd., Kawasaki, Japan
Abstract :
We studied properties of 2- to 25-nm-thick tetrahedral amorphous carbon films produced by filtered cathodic arc deposition. We found that nitrogen doping was effective in controlling film properties. Both the amount of sp3 bonding in the film and the hardness decreased with nitrogen incorporation. The adhesion of lubricant to the carbon film was improved by nitrogen doping. Tests of wear and corrosion on a nanometer scale showed the superior tribological and anticorrosion performance of tetrahedral amorphous carbon films over hydrogenated amorphous carbon films.
Keywords :
adhesion; amorphous state; bonds (chemical); carbon; corrosion protective coatings; hard discs; hardness; plasma deposition; wear resistant coatings; 2 to 25 nm; C:N; anticorrosion performance; corrosion resistance; durability; film properties control; filtered cathodic arc deposition; hard disk drives; hardness; lubricant adhesion; nanometer scale tests; nitrogen doping; sp3 bonding; tetrahedral amorphous carbon films; tribological performance; ultrathin amorphous carbon overcoats; wear; Amorphous magnetic materials; Amorphous materials; Bonding; Cathodes; Corrosion; Doping; Magnetic heads; Magnetic recording; Magnetic separation; Nitrogen;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2003.817065
