DocumentCode

791573

Title

Ion Milling Machine for Thin Film Magnetic Head Fabrication

Author

Ono, Y. ; Kurosawa, T. ; Hakamata, Y. ; Sato, T.

Author_Institution

Hitachi Ltd.

Volume

3

Issue

9

fYear

1988

Firstpage

654

Lastpage

665

Keywords

Fabrication; Ion sources; Magnetic films; Magnetic heads; Metalworking machines; Milling; Productivity; Sputter etching; Sputtering; Substrates;

fLanguage

English

Journal_Title

Magnetics in Japan, IEEE Translation Journal on

Publisher

ieee

ISSN

0882-4959

Type

jour

DOI

10.1109/TJMJ.1988.4563830

Filename

4563830