Title :
Ion Milling Machine for Thin Film Magnetic Head Fabrication
Author :
Ono, Y. ; Kurosawa, T. ; Hakamata, Y. ; Sato, T.
Author_Institution :
Hitachi Ltd.
Keywords :
Fabrication; Ion sources; Magnetic films; Magnetic heads; Metalworking machines; Milling; Productivity; Sputter etching; Sputtering; Substrates;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1988.4563830
