Title :
Fabrication of Sputtering Films with TbFeCo Alloy Targets
Author :
Maeno, Y. ; Kobayashi, M. ; Oishi, K. ; Kawamura, K.
Author_Institution :
Oki Electric Ind. Co., Ltd.
Keywords :
Coercive force; Fabrication; Intermetallic; Magnetic field measurement; Magnetic films; Magnetic recording; Sputtering; Substrates; Thickness measurement; Writing;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1988.4563832
