DocumentCode
791598
Title
Fabrication of Sputtering Films with TbFeCo Alloy Targets
Author
Maeno, Y. ; Kobayashi, M. ; Oishi, K. ; Kawamura, K.
Author_Institution
Oki Electric Ind. Co., Ltd.
Volume
3
Issue
9
fYear
1988
Firstpage
675
Lastpage
682
Keywords
Coercive force; Fabrication; Intermetallic; Magnetic field measurement; Magnetic films; Magnetic recording; Sputtering; Substrates; Thickness measurement; Writing;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1988.4563832
Filename
4563832
Link To Document