Title :
The effect of substrate temperature on the magnetic properties of FeAlN thin films for recording heads
Author :
Bain, James A. ; Kryder, Mark H.
Author_Institution :
Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
11/1/1995 12:00:00 AM
Abstract :
The soft magnetic properties of FeAlN films have been shown to be strongly dependent on the temperature of the substrate during deposition. Films of FeAlN were sputtered deposited onto Alumina/Titanium Carbide (ALTIC) ceramic substrates at substrate temperatures between 20 and 200°C. In the range of 150 to 200°C, the films display a well oriented easy axis with coercivities less than 1.5 Oe, and a hard axis coercivity of less than 1 Oe. Deposition at temperatures below 150°C resulted in high coercivities and no in-plane anisotropy. This behavior is explained in terms of the temperature dependence of the formation of the γ´-Fe4N phase (identified by x-ray diffraction), which is necessary for the soft magnetic properties. A discussion of heating transients due to substrate thermal mass is also included
Keywords :
aluminium compounds; coercive force; iron compounds; magnetic anisotropy; magnetic heads; magnetic thin films; soft magnetic materials; sputtered coatings; γ´-Fe4N phase; 20 to 200 C; ALTIC ceramic substrates; FeAlN; FeAlN thin films; X-ray diffraction; coercivities; heating transients; recording heads; soft magnetic properties; sputter deposition; substrate temperature; substrate thermal mass; Anisotropic magnetoresistance; Ceramics; Coercive force; Displays; Magnetic films; Magnetic properties; Temperature dependence; Temperature distribution; Titanium; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
