• DocumentCode
    792678
  • Title

    Improvement of Performance in Continuously Vacuum Deposited Co-Cr Film by Substrate Treatment

  • Author

    Sugita, R. ; Tohma, K. ; Nambu, T. ; Honda, K. ; Echigo, N. ; Sakamoto, Y.

  • Author_Institution
    Matsushita Electric Industrial Co., Ltd.
  • Volume
    4
  • Issue
    1
  • fYear
    1989
  • Firstpage
    10
  • Lastpage
    19
  • Abstract
    Dependence of the perpendicular anisotropy of continuously vacuum deposited Co-Cr films on glow discharge treatment of the polymer base film surface, and on the thickness of a Ti underlayer, was investigated. The relation between the film microstructure and the recording characteristics of the Co-Cr film media was also studied. When the polymer film surface was pretreated by glow discharge with Ar gas, the Hkeff of the Co-Cr films decreased, but when H2 gas was used instead of argon, the deterioration of the Hkeff was negligible. Co-Cr films deposited on a Ti underlayer had a high Hkeff regardless of the glow discharge treatment conditions. The Ti underlayers had to be more than 40 Å thick in order for the Co-Cr films to have a small ¿¿50, around 5 or 6°. The Co-Cr films showed a columnar structure when the Ti underlayer thickness was in the range from 100 to 2000 Å Co-Cr films with a columnar structure yielded a high reproduced voltage.
  • Keywords
    Argon; Fabrication; Glow discharges; Magnetic films; Microstructure; Polymer films; Substrates; Surface discharges; Surface treatment; Voltage;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1989.4563949
  • Filename
    4563949