Composition and Characteristics of Sputtered Co-Cr Films

This paper reports the relation between composition and characteristics of Co-Cr films prepared by dc magnetron sputtering. The compostition of Co-Co films can be controlled by changing the magnetic flux from magnet and solenoid coils. In films with high Cr content, a good c-axis orientation and small in-plane squareness are obtained, while the perpendicular coercivity and saturation magntization are small. The in-plane M-H loop of a Co-30 at% Cr film shows that the film has a large perpendicular anisotrophy beginning from the initial layer.