Title :
Exact extraction of piezoresistance coefficient using flat membrane
Author :
Gniazdowski, Zenon
Author_Institution :
Inst. of Electron Technol., Warsaw, Poland
Abstract :
The method for the extraction of piezoresistance coefficients with the use of a flat membrane as a test structure is considered. The necessary and sufficient conditions and conditioning of the extraction problem are examined as a problem of a correct test structure. For the given condition number, the number of the error propagation of the input data is considered.
Keywords :
membranes; piezoresistance; piezoresistive devices; resistors; semiconductor device testing; error propagation; parameter extraction; piezoresistance coefficient; piezoresistive devices; Biomembranes; Differential equations; Electrical resistance measurement; Piezoresistance; Piezoresistive devices; Resistors; Silicon; Stress; Sufficient conditions; System testing; Piezoresistance; parameter extraction; piezoresistive devices;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2005.855579
