DocumentCode
79352
Title
Erratum to “Gallium Nitride as an Electromechanical Material” [Dec 14 1252-1271]
Author
Rais-Zadeh, Mina ; Gokhale, Vikrant Jayant ; Faucher, Marc ; Theron, Didier ; Cordier, Yvon ; Buchaillot, Lionel
Volume
24
Issue
1
fYear
2015
fDate
Feb. 2015
Firstpage
249
Lastpage
249
Abstract
In the above paper [1] , there were errors in Table V and Fig. 26 . The corrected table and figure are as follows.
Keywords
Gallium nitride; HEMTs; III-V semiconductor materials; Material properties; Micromachining; Piezoelectric materials;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2014.2376351
Filename
6977908
Link To Document