Title :
Erratum to “Gallium Nitride as an Electromechanical Material” [Dec 14 1252-1271]
Author :
Rais-Zadeh, Mina ; Gokhale, Vikrant Jayant ; Faucher, Marc ; Theron, Didier ; Cordier, Yvon ; Buchaillot, Lionel
Abstract :
In the above paper [1], there were errors in Table V and Fig. 26. The corrected table and figure are as follows.
Keywords :
Gallium nitride; HEMTs; III-V semiconductor materials; Material properties; Micromachining; Piezoelectric materials;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2014.2376351
