• DocumentCode
    79352
  • Title

    Erratum to “Gallium Nitride as an Electromechanical Material” [Dec 14 1252-1271]

  • Author

    Rais-Zadeh, Mina ; Gokhale, Vikrant Jayant ; Faucher, Marc ; Theron, Didier ; Cordier, Yvon ; Buchaillot, Lionel

  • Volume
    24
  • Issue
    1
  • fYear
    2015
  • fDate
    Feb. 2015
  • Firstpage
    249
  • Lastpage
    249
  • Abstract
    In the above paper [1], there were errors in Table V and Fig. 26. The corrected table and figure are as follows.
  • Keywords
    Gallium nitride; HEMTs; III-V semiconductor materials; Material properties; Micromachining; Piezoelectric materials;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2014.2376351
  • Filename
    6977908