DocumentCode :
79352
Title :
Erratum to “Gallium Nitride as an Electromechanical Material” [Dec 14 1252-1271]
Author :
Rais-Zadeh, Mina ; Gokhale, Vikrant Jayant ; Faucher, Marc ; Theron, Didier ; Cordier, Yvon ; Buchaillot, Lionel
Volume :
24
Issue :
1
fYear :
2015
fDate :
Feb. 2015
Firstpage :
249
Lastpage :
249
Abstract :
In the above paper [1], there were errors in Table V and Fig. 26. The corrected table and figure are as follows.
Keywords :
Gallium nitride; HEMTs; III-V semiconductor materials; Material properties; Micromachining; Piezoelectric materials;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2014.2376351
Filename :
6977908
Link To Document :
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