DocumentCode
794435
Title
Cerium substituted YIG single crystalline film prepared with ultra-high-vacuum magnetron sputtering
Author
Okamura, Y. ; Kubota, J. ; Yamamoto, S.
Author_Institution
Dept. of Electr. Eng., Osaka Univ., Japan
Volume
31
Issue
6
fYear
1995
fDate
11/1/1995 12:00:00 AM
Firstpage
3289
Lastpage
3291
Abstract
This paper is concerned with the preparation of cerium substituted yttrium iron garnet which is known to be an oxide with a large magneto-optic effect. Using magnetron sputtering we successfully grew an epitaxial film on a nonmagnetic substrate. Here we investigate the conditions of the single crystal film growth by use of the sputtering technique: dependence of the lattice constant and the Faraday coefficient on the oxygen flow rate and the sputtering pressure. The obtained films are different from the films reported previously
Keywords
Faraday effect; X-ray diffraction; cerium compounds; garnets; lattice constants; magnetic epitaxial layers; sputter deposition; yttrium compounds; Ce-YIG single crystalline film; CeY2Fe5O12; Faraday coefficient; O2 flow rate; X-ray diffraction pattern; epitaxial film; garnet; large magneto-optic effect; lattice constant; nonmagnetic substrate; single crystal film growth; specific Faraday rotation; sputtering pressure; ultra-high-vacuum magnetron sputtering; Cerium; Crystallization; Garnet films; Iron; Magnetooptic effects; Optical films; Optical waveguides; Particle beam optics; Sputtering; Substrates;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.490363
Filename
490363
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