• DocumentCode
    795344
  • Title

    Performance of RF MEMS switches at low temperatures

  • Author

    Su, Hieng ; Llamas-Garro, I. ; Lancaster, Michael J. ; Prest, M. ; Park, Je-Ho ; Kim, J.-M. ; Baek, C.-W. ; Kim, Y.-K.

  • Author_Institution
    Sch. of Eng., Swinburne Univ. of Technol.
  • Volume
    42
  • Issue
    21
  • fYear
    2006
  • Firstpage
    1219
  • Lastpage
    1220
  • Abstract
    The actuation voltage of microelectromechanical system (MEMS) metal switches was investigated at temperatures ranging from 10 to 290 K. The investigation shows a 50% increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature
  • Keywords
    cryogenic electronics; microswitches; microwave switches; 10 to 290 K; MEMS; actuation voltage; microelectromechanical system metal switches; radiofrequency switches;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • Filename
    1715192
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=795344