Title :
Performance of RF MEMS switches at low temperatures
Author :
Su, Hieng ; Llamas-Garro, I. ; Lancaster, Michael J. ; Prest, M. ; Park, Je-Ho ; Kim, J.-M. ; Baek, C.-W. ; Kim, Y.-K.
Author_Institution :
Sch. of Eng., Swinburne Univ. of Technol.
Abstract :
The actuation voltage of microelectromechanical system (MEMS) metal switches was investigated at temperatures ranging from 10 to 290 K. The investigation shows a 50% increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature
Keywords :
cryogenic electronics; microswitches; microwave switches; 10 to 290 K; MEMS; actuation voltage; microelectromechanical system metal switches; radiofrequency switches;
Journal_Title :
Electronics Letters
