Title :
Planar graded-index (GRIN) PECVD lens
Author :
Beltrami, D.R. ; Love, J.D. ; Durandet, A. ; Samoc, A. ; Samoc, M. ; Luther-Davies, B. ; Boswell, R.W.
Author_Institution :
Australian Nat. Univ., Canberra, ACT, Australia
fDate :
3/14/1996 12:00:00 AM
Abstract :
The authors report the design, fabrication and characterisation of a planar gradient index (GRIN) PECVD lens. The PECVD-based helicon plasma reactor was used to deposit graded layers onto a silicon wafer. Ray tracing and beam propagation methods were used to simulate the periodic refocussing of the nominally parabolic refractive index profile. Propagation characteristics were measured using a standard prism coupler and also by observing fluorescence from a specially doped thin polymer layer spun on to the top of the planar lens
Keywords :
CVD coatings; gradient index optics; lenses; optical fabrication; optical focusing; optical planar waveguides; optical waveguide components; ray tracing; Si; beam propagation; design; fabrication; fluorescence; helicon plasma reactor; parabolic refractive index profile; periodic refocussing; planar GRIN PECVD lens; prism coupler; ray tracing; silicon wafer; simulation; spun on doped polymer layer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19960382
